grobe Fertigungsrückstände

English translation: rough process residues/process residue deposits

GLOSSARY ENTRY (DERIVED FROM QUESTION BELOW)
German term or phrase:grobe Fertigungsrückstände
English translation:rough process residues/process residue deposits
Entered by: shirkya2002

12:36 Aug 25, 2009
German to English translations [PRO]
Science - Physics / Plasma nitriding - sputtering
German term or phrase: grobe Fertigungsrückstände
Das Sputtern ersetzt jedoch nicht die Reinigung der Bauteile von groben Fertigungsrückständen.
shirkya2002
India
Local time: 20:49
rough process residues/process residue deposits
Explanation:
I think, but I'm not sure.

A method of cleaning process residues from the surface of a substrate processing chamber component having holes. In the method, the component is at least partially immersed into a cleaning solution having hydrafluoric acid and nitric acid, and a non-reactive gas is passed through the holes to prevent the cleaning solution from back-flowing into the holes during the cleaning process. The method is particularly useful for cleaning sputtering residue deposits from an electrostatic chuck used in a sputtering process.
http://www.freepatentsonline.com/6821350.html
Selected response from:

Kim Metzger
Mexico
Local time: 09:19
Grading comment
thx
4 KudoZ points were awarded for this answer



Summary of answers provided
3 +1rough process residues/process residue deposits
Kim Metzger


  

Answers


17 mins   confidence: Answerer confidence 3/5Answerer confidence 3/5 peer agreement (net): +1
rough process residues/process residue deposits


Explanation:
I think, but I'm not sure.

A method of cleaning process residues from the surface of a substrate processing chamber component having holes. In the method, the component is at least partially immersed into a cleaning solution having hydrafluoric acid and nitric acid, and a non-reactive gas is passed through the holes to prevent the cleaning solution from back-flowing into the holes during the cleaning process. The method is particularly useful for cleaning sputtering residue deposits from an electrostatic chuck used in a sputtering process.
http://www.freepatentsonline.com/6821350.html


Kim Metzger
Mexico
Local time: 09:19
Native speaker of: Native in EnglishEnglish
PRO pts in category: 16
Grading comment
thx

Peer comments on this answer (and responses from the answerer)
agree  Blaess: ;)
7 hrs
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